Introduction
Substrates are fundamental in materials science, optics, and semiconductor research conducted in university applied physics departments. This page highlights the most commonly used substrates and their properties.
Common Substrates
1. Silicon (Si)
Silicon is a versatile substrate used for semiconductor and MEMS research due to its availability and excellent electrical properties.
- Orientations: <100>, <111>, <110>
- Thickness: 200–750 µm
- Applications: Thin-film deposition, MEMS, photovoltaics
2. Quartz (Fused Silica)
Quartz is ideal for optical experiments due to its transparency in UV, visible, and IR light ranges.
- Properties: High thermal stability, optical clarity
- Applications: Optics, coatings, high-temperature testing
3. Sapphire (Al₂O₃)
Sapphire is used in optical and high-temperature applications, particularly for GaN growth.
- Crystal Planes: C-plane, A-plane
- Applications: LEDs, optical coatings, thermal experiments
4. Glass Substrates
Glass substrates are cost-effective and commonly used in optics and microfluidics.
- Types: Borosilicate, soda-lime glass
- Applications: Microfluidics, optical coatings
5. Silicon Carbide (SiC)
SiC is favored for its robustness and high thermal conductivity.
- Applications: Power electronics, thermal studies
Comparison Table of Substrates
| Material | Properties | Applications |
|---|---|---|
| Silicon (Si) | Versatile, semiconductor properties | MEMS, thin films, photovoltaics |
| Quartz | Optical clarity, thermal stability | Optics, coatings |
| Sapphire | High mechanical and thermal stability | GaN growth, LEDs, optical studies |
| Glass | Cost-effective, transparent | Microfluidics, optics |
| Silicon Carbide | High thermal conductivity | Power electronics, thermal management |